Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
AIP Conference Proceedings
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2014
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sg-nus-scholar.10635-747132024-11-10T14:01:09Z Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L. CHEMICAL & BIOMOLECULAR ENGINEERING Ge-pai Halo implant Phosphorus Spacer anneal SPER Spike anneal AIP Conference Proceedings 866 58-61 2014-06-19T06:15:35Z 2014-06-19T06:15:35Z 2006 Conference Paper Yeong, S.H., Colombeau, B., Benistant, F., Srinivasan, M.P., Mulcahy, C.P.A., Lee, P.S., Chan, L. (2006). Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal. AIP Conference Proceedings 866 : 58-61. ScholarBank@NUS Repository. 0735403651 0094243X http://scholarbank.nus.edu.sg/handle/10635/74713 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Ge-pai Halo implant Phosphorus Spacer anneal SPER Spike anneal |
| spellingShingle |
Ge-pai Halo implant Phosphorus Spacer anneal SPER Spike anneal Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L. Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal |
| description |
AIP Conference Proceedings |
| author2 |
CHEMICAL & BIOMOLECULAR ENGINEERING |
| author_facet |
CHEMICAL & BIOMOLECULAR ENGINEERING Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L. |
| format |
Conference or Workshop Item |
| author |
Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L. |
| author_sort |
Yeong, S.H. |
| title |
Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal |
| title_short |
Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal |
| title_full |
Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal |
| title_fullStr |
Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal |
| title_full_unstemmed |
Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal |
| title_sort |
phosphorus implant for s/d extension formation: diffusion and activation study after spacer and spike anneal |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/74713 |
| _version_ |
1821217219027140608 |