Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)

Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)

10.1149/1.1545466

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書目詳細資料
Main Authors:	Zhang, Y., Kang, E.T., Neoh, K.G., Ang, S.S., Huan, A.C.H.
其他作者:	CHEMICAL & ENVIRONMENTAL ENGINEERING
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/85709
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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