SCREAM micromachined high aspect ratio low-G microaccelerometer

SCREAM micromachined high aspect ratio low-G microaccelerometer

Proceedings of SPIE - The International Society for Optical Engineering

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書目詳細資料
Main Authors:	Tay, Francis E.H., Logeeswaran, V.J., Liang, Y.C.
其他作者:	ELECTRICAL ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/81729
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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