Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning

• Main Authors: Xu, Y., Singh, J., Selvaratnam, T., Chen, N.
• 其他作者: BIOENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: Electrothermal effects; Microelectromechanical devices; Micromachining
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/74942
• 機構: National University of Singapore

10.1109/JSTQE.2009.2016436