Micromachined III-V multimorph actuators for MOEMS applications - Concept, design, and model

• Main Authors: Ongkodjojo, A., Tay, F.E.H., Akkipeddi, R.
• 其他作者: MECHANICAL ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: AlAs-GaAs; Global optimization; III-V materials; Microactuator; Microoptoelectromechanical systems (MOEMS); Multimorph; Piezoelectric effect; Simulated annealing (SA)
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/60745
• 機構: National University of Singapore

10.1109/JMEMS.2005.844779