Rutherford backscattering analysis of GaN decomposition

• Main Authors: Choi, H.W., Cheong, M.G., Rana, M.A., Chua, S.J., Osipowicz, T., Pan, J.S.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Article
• 出版: 2014
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/57323
• 機構: National University of Singapore

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures