Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition

• Main Authors: Feng, Z.C., Tin, C.C., Hu, R., Williams, J.
• 其他作者: PHYSICS
• 格式: Article
• 出版: 2014
• 主題: Chemical vapour deposition; Raman scattering; Rutherford backscattering spectroscopy; Silicon carbide
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/53124

Thin Solid Films