Optimization of diamond-like carbon thin film on copper substrate for carbon nanotubes synthesis by ACVD technique

• Main Authors: Chotika Suttichart, Dheerawan Boonyawan, Wim Nhuapeng, Wandee Thamjaree
• 格式: Book Series
• 出版: 2018
• 主題: Materials Science; Agricultural and Biological Sciences
• 在線閱讀: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85011360809&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/46877
• 機構: Chiang Mai University

� 2017 Trans Tech Publications, Switzerland. In this research, demonstrate plasma treatment on copper substrate by Radio Frequency Plasma (RF) using a mixture of 70%C 2 H 2 + 30%H 2 as the working gases. The plasma exposure time were varied from 10, 20 and 30 min under the electrical power of 50 W...