Footing reduction in the organic bottom anti-reflective coating implementation

• Main Authors: Ko, T.-M., Cheng, A.
• 其他作者: CHEMICAL ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: Computer simulation; Descrum; Footing; Organic barc; Photoresist; Planarization; Reflectivity; Resist profile; Sidewall angle; Swing curve
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/91810
• 機構: National University of Singapore

10.1117/12.280540