A universal scheme for patterning of oxides via thermal nanoimprint lithography

A universal scheme for patterning of oxides via thermal nanoimprint lithography

10.1002/adfm.201202577

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書目詳細資料
Main Authors:	Dinachali, S.S., Saifullah, M.S.M., Ganesan, R., Thian, E.S., He, C.
其他作者:	MECHANICAL ENGINEERING
格式:	Article
出版:	2014
主題:	alkoxides nanoimprint lithography oxides patterning
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/84835
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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