Two masks process for high aspect ratio inertial sensors with ajustable range

Proceedings of the International Semiconductor Conference, CAS

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التفاصيل البيبلوغرافية
المؤلفون الرئيسيون:	Iliescu, C., Avram, M., Miao, J., Tay, F.E.H., Xu, G.
مؤلفون آخرون:	MECHANICAL ENGINEERING
التنسيق:	Conference or Workshop Item
منشور في:	2014
الموضوعات:	Anodic bonding Comb drive High aspect ratio Inertial sensors with adjustable range
الوصول للمادة أونلاين:	http://scholarbank.nus.edu.sg/handle/10635/73986
الوسوم:	إضافة وسم لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!
المؤسسة:	National University of Singapore

id	sg-nus-scholar.10635-73986
record_format	dspace
spelling	sg-nus-scholar.10635-739862024-11-12T19:00:14Z Two masks process for high aspect ratio inertial sensors with ajustable range Iliescu, C. Avram, M. Miao, J. Tay, F.E.H. Xu, G. MECHANICAL ENGINEERING Anodic bonding Comb drive High aspect ratio Inertial sensors with adjustable range Proceedings of the International Semiconductor Conference, CAS 1 263-266 2014-06-19T05:41:45Z 2014-06-19T05:41:45Z 2004 Conference Paper Iliescu, C.,Avram, M.,Miao, J.,Tay, F.E.H.,Xu, G. (2004). Two masks process for high aspect ratio inertial sensors with ajustable range. Proceedings of the International Semiconductor Conference, CAS 1 : 263-266. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/73986 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Anodic bonding Comb drive High aspect ratio Inertial sensors with adjustable range
spellingShingle	Anodic bonding Comb drive High aspect ratio Inertial sensors with adjustable range Iliescu, C. Avram, M. Miao, J. Tay, F.E.H. Xu, G. Two masks process for high aspect ratio inertial sensors with ajustable range
description	Proceedings of the International Semiconductor Conference, CAS
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Iliescu, C. Avram, M. Miao, J. Tay, F.E.H. Xu, G.
format	Conference or Workshop Item
author	Iliescu, C. Avram, M. Miao, J. Tay, F.E.H. Xu, G.
author_sort	Iliescu, C.
title	Two masks process for high aspect ratio inertial sensors with ajustable range
title_short	Two masks process for high aspect ratio inertial sensors with ajustable range
title_full	Two masks process for high aspect ratio inertial sensors with ajustable range
title_fullStr	Two masks process for high aspect ratio inertial sensors with ajustable range
title_full_unstemmed	Two masks process for high aspect ratio inertial sensors with ajustable range
title_sort	two masks process for high aspect ratio inertial sensors with ajustable range
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73986
_version_	1821203068316811264

Two masks process for high aspect ratio inertial sensors with ajustable range

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