Nanoindentation study of sputtered Al-Cu thin films for interconnect applications
10.1109/EPTC.2006.342774
Saved in:
| Main Authors: | , , , , |
|---|---|
| 其他作者: | |
| 格式: | Conference or Workshop Item |
| 出版: |
2014
|
| 在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/73664 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | National University of Singapore |