Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization
Materials Research Society Symposium - Proceedings
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| Main Authors: | , , , , , |
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| 格式: | Conference or Workshop Item |
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2014
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| 在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/71512 |
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| 機構: | National University of Singapore |