Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
10.1023/A:1024824818808
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Main Authors: | Chan, M.L., Tay, F.E.H., Logeeswaran, V.J., Zeng, K.Y., Shen, L., Chau, F.S. |
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其他作者: | MECHANICAL ENGINEERING |
格式: | Article |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/60238 |
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機構: | National University of Singapore |
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