Multiplexed MPC for multizone thermal processing in semiconductor manufacturing

• Main Authors: Ling, K.V., Ho, W.K., Wu, B.F., Lo, A., Yan, H.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Feed-forward; model predictive control (MPC); multiplexed; process control; semiconductor manufacturing; temperature control
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/56730
• 機構: National University of Singapore

10.1109/TCST.2009.2036155