Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates

10.1063/1.2186511

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書目詳細資料
Main Authors: Yang, S.-W., Dai, L., Chen, X.-T., Wu, P., Tan, V.B.C.
其他作者: MECHANICAL ENGINEERING
格式: Article
出版: 2014
在線閱讀:http://scholarbank.nus.edu.sg/handle/10635/51443
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機構: National University of Singapore