An on-chip opto-mechanical accelerometer

• المؤلفون الرئيسيون: Dong, Bin, Kwong, Dim Lee, Cai, H., Tsai, J. M., Liu, A. Q.
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/98680; http://hdl.handle.net/10220/17546
• المؤسسة: Nanyang Technological University

Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their pr...