NiTi shape memory alloy thin film based microgripper

• المؤلف الرئيسي: Tan, Jun Ping.
• مؤلفون آخرون: Huang, Weimin
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/6464
• المؤسسة: Nanyang Technological University

The objectives of this project are to produce NiTi thin film that exhibits Shape Memory Effect (SME) onto a cantilever beam and to produce a microgripper of size about 750x350x350 micrometer using the cantilever structure.