Characterization of mechanical properties of microfabricated film
This paper reports on the development of a tester capable of measuring the submicron level deformation of microfabricated films deformed by a compressive force of micro-Newton range.
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| 格式: | Theses and Dissertations |
| 出版: |
2008
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| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/5868 |
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| 機構: | Nanyang Technological University |