Process control with recipe management system
In a semiconductor assembly and test firm, a Recipe Management System is implemented. The system is to help to manage the process programs – called recipes, used for production for each process step. It essentially maintains master recipes in a centralized location and provides automatic upload and...
Saved in:
主要作者: | |
---|---|
其他作者: | |
格式: | Theses and Dissertations |
出版: |
2008
|
主題: | |
在線閱讀: | http://hdl.handle.net/10356/5848 |
標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
機構: | Nanyang Technological University |