Large scale low cost fabrication of diameter controllable silicon nanowire arrays

• المؤلفون الرئيسيون: Sun, Leimeng, Fan, Yu, Wang, Xinghui, Agung Susantyoko, Rahmat, Zhang, Qing
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2014
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/103458; http://hdl.handle.net/10220/24497

We report on a novel solution etching method to fabricate vertically aligned aperiodic silicon nanowire (SiNW) arrays. We begin with a simple dewetting process to fabricate a monolayer of well-spaced metal particles in situ on a silicon wafer. The particles function as a sacrificial template to patt...