Penentuan tegangan optimal tabung akselerator mesin implantor ion=The measurement of accelerator tube optimal voltage of ion implantor machice
The measurement of accelerator tube optimal voltage which using Cr ++4- ion has been investigated. The optimal voltage is due to high voltage which transfer maximum ion beam. The influence parameters of the ion implantor machine are anode voltage, current of cathode heater filament, extractor voltag...
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| Format: | Article NonPeerReviewed |
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[Yogyakarta] : Universitas Gadjah Mada
2005
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| Online Access: | https://repository.ugm.ac.id/18027/ http://i-lib.ugm.ac.id/jurnal/download.php?dataId=802 |
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| Summary: | The measurement of accelerator tube optimal voltage which using Cr ++4- ion has been investigated. The optimal voltage is due to high voltage which transfer maximum ion beam. The influence parameters of the ion implantor machine are anode voltage, current of cathode heater filament, extractor voltage, chink voltage, current of magnetic quadrupole, and accelerator tube voltage. The optimal voltage of anode can be obtained from the various voltage and note the current of ion beam while the accelerator tube voltage is zero. The same way can be obtained for getting the optimal of filament current, the optimal of extractor voltage, the optimal of chink voltage, and the optimal of magnetic current. The optimal voltage of accelerator tube can be obtained by giving various voltage to the accelerator tube and determine the current of ion beam.The result showed that the optimal voltage of the accelerator tube was 95.6 kV and the number of ion beam was 1.04 x 10 13 particles/ second.
Keywords : accelerator, ion, optimal voltage |
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