Penentuan tegangan optimal tabung akselerator mesin implantor ion=The measurement of accelerator tube optimal voltage of ion implantor machice
The measurement of accelerator tube optimal voltage which using Cr ++4- ion has been investigated. The optimal voltage is due to high voltage which transfer maximum ion beam. The influence parameters of the ion implantor machine are anode voltage, current of cathode heater filament, extractor voltag...
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Format: | Article NonPeerReviewed |
Published: |
[Yogyakarta] : Universitas Gadjah Mada
2005
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Online Access: | https://repository.ugm.ac.id/18027/ http://i-lib.ugm.ac.id/jurnal/download.php?dataId=802 |
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Institution: | Universitas Gadjah Mada |