“Multipoint force feedback” leveling of massively parallel tip arrays in scanning probe lithography

بواسطة Noh, Hanaul, Jung, Goo-Eun, Kim, Sukhyun, Yun, Seong-Hun, Jo, Ahjin, Kahng, Se-Jong, Cho, Nam-Joon, Cho, Sang-Joon
منشور في 2015