Author Search Results

1

Resolution performance of programmable proximity aperture MeV ion beam lithography system

Resolution performance of programmable proximity aperture MeV ion beam lithography system

by Sergey Gorelick, Timo Sajavaara, Mikko Laitinen, Nitipon Puttaraksa, Harry J. Whitlow
Published 2018

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Conference Proceeding

2

Programmable proximity aperture lithography with MeV ion beams

Programmable proximity aperture lithography with MeV ion beams

by Nitipon Puttaraksa, Sergey Gorelick, Timo Sajavaara, Mikko Laitinen, Somsorn Singkarat, Harry J. Whitlow
Published 2018

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Journal