Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration

by Tsai Shih-Hao, Chun-Kuei Chen, WANG XINGHUA, UMESH CHAND, SONU DEVI, Evgeny Zamburg, THEAN VOON YEW, AARON
Published 2022

Stress-Memorized HZO for High-Performance Ferroelectric Field-Effect Memtransistor

by Tsai Shih-Hao, Fang Zihang, WANG XINGHUA, UMESH CHAND, Chun-Kuei Chen, SONU DEVI, SIVAN MAHESWARI, JIEMING PAN, Evgeny Zamburg, THEAN VOON YEW, AARON
Published 2022