Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon

由 Lau, W.S., Sane, V., Pey, K.S., Cronquist, B.
出版 2014

Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

由 Mangelinck, D., Lee, P.S., Osipowitcz, T., Pey, K.L.
出版 2014

Expanded Papers From the 2003 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

由 Pey, K.L., Radhakrishnan, M.K., Trigg, A.
出版 2014

Effect of BF2 + implantation on void formation in Ti-salicided narrow polysilicon lines

由 Pey, K.L., Chua, H.N., Siah, S.Y.
出版 2014

In situ XRD analysis of Ni(Pt)/Si(100) reactions in low temperature regime ≤400 °C

由 Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chan, L.
出版 2014

On the morphological changes of Ni- and Ni(Pt)-silicides

由 Lee, P.S., Pey, K.L., Mangelinck, D., Chi, D.Z., Osipowicz, T.
出版 2014

Effect of transmission line pulsing of interconnects investigated using combined low-frequency noise and resistance measurements

由 Chu, L.W., Chim, W.K., Pey, K.L., See, A.
出版 2014

Effects of high current conduction in sub-micron Ti-silicided films

由 Gan, C.L., Pey, K.L., Chim, W.K., Siah, S.Y.
出版 2014

Study of implanted boron distribution in p+n structures using scanning capacitance microscopy

由 Teo, Y.L., Pey, K.L., Chim, W.K., Chong, Y.F.
出版 2014

Layer inversion of Ni(Pt)Si on mixed phase Si films

由 Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Osipowicz, T., See, A.
出版 2014

Physical analysis of Ti-migration in 33 Å gate oxide breakdown

由 Pey, K.L., Tung, C.H., Lin, W.H., Radhakrishnan, M.K.
出版 2014

Formation of voids in Ti-salicided BF+ 2-doped submicron polysilicon lines

由 Chua, H.N., Pey, K.L., Lai, W.H., Siah, S.Y.
出版 2014

Porous polymeric membranes by bicontinuous microemulsion polymerization: Effect of anionic and cationic surfactants

由 Chieng, T.H., Gan, L.M., Teo, W.K., Pey, K.L.
出版 2014

Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees

由 Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K.
出版 2014

Improved NiSi salicide process using presilicide N2 + implant for MOSFETs

由 Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Wee, A.T.S., Chan, L.
出版 2014

Control of transient enhanced diffusion of boron after laser thermal processing of preamorphized silicon

由 Chong, Y.F., Pey, K.L., Wee, A.T.S., Osipowicz, T., See, A., Chan, L.
出版 2014

Study of the morphological modifications induced by laser annealing of preamorphized silicon

由 Chong, Y.F., Pey, K.L., Lu, Y.F., Wee, A.T.S., See, A.
出版 2014

Comparative study of current-voltage characteristics of Ni and Ni(Pt)-alloy suicided p+/n diodes

由 Chi, D.Z., Mangelinck, D., Lahiri, S.K., Lee, P.S., Pey, K.L.
出版 2016

Design and characterisation of a single-reflection, solid-state detector with high discrimination against backscattered electrons for cathodoluminescence microscopy

由 Pey, K.L., Phang, J.C.H., Chan, D.S.H., Leong, Y.K.
出版 2014

A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer

由 Tan, W.L., Pey, K.L., Chooi, S.Y.M., Ye, J.H.
出版 2014