Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon

بواسطة Lau, W.S., Sane, V., Pey, K.S., Cronquist, B.
منشور في 2014

Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

بواسطة Mangelinck, D., Lee, P.S., Osipowitcz, T., Pey, K.L.
منشور في 2014

Expanded Papers From the 2003 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

بواسطة Pey, K.L., Radhakrishnan, M.K., Trigg, A.
منشور في 2014

Effect of BF2 + implantation on void formation in Ti-salicided narrow polysilicon lines

بواسطة Pey, K.L., Chua, H.N., Siah, S.Y.
منشور في 2014

In situ XRD analysis of Ni(Pt)/Si(100) reactions in low temperature regime ≤400 °C

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chan, L.
منشور في 2014

On the morphological changes of Ni- and Ni(Pt)-silicides

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Chi, D.Z., Osipowicz, T.
منشور في 2014

Effect of transmission line pulsing of interconnects investigated using combined low-frequency noise and resistance measurements

بواسطة Chu, L.W., Chim, W.K., Pey, K.L., See, A.
منشور في 2014

Effects of high current conduction in sub-micron Ti-silicided films

بواسطة Gan, C.L., Pey, K.L., Chim, W.K., Siah, S.Y.
منشور في 2014

Study of implanted boron distribution in p+n structures using scanning capacitance microscopy

بواسطة Teo, Y.L., Pey, K.L., Chim, W.K., Chong, Y.F.
منشور في 2014

Layer inversion of Ni(Pt)Si on mixed phase Si films

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Osipowicz, T., See, A.
منشور في 2014

Physical analysis of Ti-migration in 33 Å gate oxide breakdown

بواسطة Pey, K.L., Tung, C.H., Lin, W.H., Radhakrishnan, M.K.
منشور في 2014

Formation of voids in Ti-salicided BF+ 2-doped submicron polysilicon lines

بواسطة Chua, H.N., Pey, K.L., Lai, W.H., Siah, S.Y.
منشور في 2014

Porous polymeric membranes by bicontinuous microemulsion polymerization: Effect of anionic and cationic surfactants

بواسطة Chieng, T.H., Gan, L.M., Teo, W.K., Pey, K.L.
منشور في 2014

Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees

بواسطة Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K.
منشور في 2014

Improved NiSi salicide process using presilicide N2 + implant for MOSFETs

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Wee, A.T.S., Chan, L.
منشور في 2014

Control of transient enhanced diffusion of boron after laser thermal processing of preamorphized silicon

بواسطة Chong, Y.F., Pey, K.L., Wee, A.T.S., Osipowicz, T., See, A., Chan, L.
منشور في 2014

Study of the morphological modifications induced by laser annealing of preamorphized silicon

بواسطة Chong, Y.F., Pey, K.L., Lu, Y.F., Wee, A.T.S., See, A.
منشور في 2014

Comparative study of current-voltage characteristics of Ni and Ni(Pt)-alloy suicided p+/n diodes

بواسطة Chi, D.Z., Mangelinck, D., Lahiri, S.K., Lee, P.S., Pey, K.L.
منشور في 2016

Design and characterisation of a single-reflection, solid-state detector with high discrimination against backscattered electrons for cathodoluminescence microscopy

بواسطة Pey, K.L., Phang, J.C.H., Chan, D.S.H., Leong, Y.K.
منشور في 2014

A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer

بواسطة Tan, W.L., Pey, K.L., Chooi, S.Y.M., Ye, J.H.
منشور في 2014