Large Area, Facile Oxide Nanofabrication via Step-and-Flash Imprint Lithography of Metal-Organic Hybrid Resins

• Main Authors: Dinachali, S.S., Dumond, J., Saifullah, M.S.M., Ansah-Antwi, K.K., Ganesan, R., Thian, E.S., He, C.
• 其他作者: MECHANICAL ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Metal oxides; Metal-organic resins; Nanofabrication; Nanolithography; Step-and-flash nanoimprint lithography
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/85344

10.1021/am404136p