APA Citation

Chua, G., Tay, C., Quan, C., Lin, Q., & ENGINEERING, M. (2014). Edge effects characterization of phase shift mask.

Chicago Style Citation

Chua, G.S., C.J Tay, C. Quan, Q. Lin, and MECHANICAL ENGINEERING. Edge Effects Characterization of Phase Shift Mask. 2014.

MLA Citation

Chua, G.S., et al. Edge Effects Characterization of Phase Shift Mask. 2014.

Warning: These citations may not always be 100% accurate.