Tay, A., Wang, Y., Chua, H., & ENGINEERING, E. &. C. (2014). Equipment design and control of advanced thermal processing system in lithography.
Chicago Style CitationTay, A., Y. Wang, H.T Chua, and ELECTRICAL & COMPUTER ENGINEERING. Equipment Design and Control of Advanced Thermal Processing System in Lithography. 2014.
MLA引文Tay, A., Y. Wang, H.T Chua, and ELECTRICAL & COMPUTER ENGINEERING. Equipment Design and Control of Advanced Thermal Processing System in Lithography. 2014.
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