Theoretical model of a three plates capacitive pressure sensor
Conference Record - IEEE Instrumentation and Measurement Technology Conference
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Main Authors: | Ge, P., Tan, W.W., Tay, F. |
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其他作者: | ELECTRICAL & COMPUTER ENGINEERING |
格式: | Conference or Workshop Item |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/51263 |
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機構: | National University of Singapore |
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