Influence of bias voltage on the hardness and toughness of CrAlN coatings via magnetron sputtering

• المؤلفون الرئيسيون: Lee, Jyh-Wei, Lew, Wen Siang, Li, Bo, Zhang, Sam, Wang, Yu Xi
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2013
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/96581; http://hdl.handle.net/10220/10302

Chromium aluminum nitride (CrAlN) coatings were prepared via magnetron sputtering in a mixed Ar and N2 ambient. The effect of negative bias voltage (Vb) on the microstructure was investigated using a spectrum of characterizing techniques in terms of Glancing Angle X-ray Diffractometry, Field Emissio...