A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy

• Main Authors: Cometto, Olivier, Dennett, Cody A., Tsang, Siu Hon, Short, Michael P., Teo, Edwin Hang Tong
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2018
• 主題: Carbon Nitride; HiPIMS
• 在線閱讀: https://hdl.handle.net/10356/89517; http://hdl.handle.net/10220/44975
• 機構: Nanyang Technological University

In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrys...