Design of CIM environment for automated wafer manufacturing process cell system

• المؤلف الرئيسي: Channaiah B. Ramakumar.
• مؤلفون آخرون: Goh, Kiah Mok
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Manufacturing::Production management
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/6317
• المؤسسة: Nanyang Technological University

This thesis focuses on the issues concerned with the design of Computer Integrated Manufacturing (CIM) environment based on Semiconductor Equipment and Materials International (SEMI) guidelines and SEMATECH standards framework used in shop floor information control system for wafer manufacturing pro...