Chemical characteristics of diamond-like carbon films

• المؤلف الرئيسي: Zeng, Aiping
• مؤلفون آخرون: Liu, Erjia
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/5512

In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films.