Fabrication and characterisation of microelectronics materials and devices
To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications.
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格式: | Research Report |
出版: |
2008
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在線閱讀: | http://hdl.handle.net/10356/3005 |
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機構: | Nanyang Technological University |
總結: | To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications. |
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