Fabrication and characterisation of microelectronics materials and devices

To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications.

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書目詳細資料
主要作者: Lam, Yee Loy
其他作者: School of Electrical and Electronic Engineering
格式: Research Report
出版: 2008
主題:
在線閱讀:http://hdl.handle.net/10356/3005
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機構: Nanyang Technological University
實物特徵
總結:To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications.