Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach

• المؤلفون الرئيسيون: Liu, Haotian, Zhang, Li, Li, Holden King Ho, Tan, Ooi Kiang
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2019
• الموضوعات: Gas Sensor; Metal Oxide (MOX) Sensor; DRNTU::Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/103552; http://hdl.handle.net/10220/47336

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their b...