A study on the mechanical behavior of the sputtered nickel thin Films for UBM applications

由 Sekhar, V.N., Srinivasarao, V., Jayaganthan, R., Mohankumar, K., Tay, A.A.O.
出版 2014

Nanoindentation study of the sputtered Cu thin films for interconnect applications

由 Srinivasarao, V., Jayaganthan, R., Sekhar, V.N., Mohankumar, K., Tay, A.A.O., Kripesh, V.
出版 2014