A study on the mechanical behavior of the sputtered nickel thin Films for UBM applications

بواسطة Sekhar, V.N., Srinivasarao, V., Jayaganthan, R., Mohankumar, K., Tay, A.A.O.
منشور في 2014

Nanoindentation study of the sputtered Cu thin films for interconnect applications

بواسطة Srinivasarao, V., Jayaganthan, R., Sekhar, V.N., Mohankumar, K., Tay, A.A.O., Kripesh, V.
منشور في 2014