Interferential lithography of 1D thin metallic sinusoidal gratings : accurate control of the profile for azimuthal angular dependent plasmonic effects and applications

بواسطة Romanato, Filippo, Kang, Husen Kartasasmita, Lee, Kwang Hong, Ruffato, Gianluca, Prasciolu, Mauro, Wong, Chee Cheong
منشور في 2010