Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF-UHF hybrid plasmas

بواسطة B. B. Sahu, Kyung S. Shin, Jeon G. Han
منشور في 2018

Effect of helium incorporation on plasma parameters and characteristic properties of hydrogen free carbon films deposited using DC magnetron sputtering

بواسطة Bibhuti B. Sahu, Sung I. Kim, Min W. Lee, Jeon G. Han
منشور في 2020

Plasma diagnostic in LiMn<inf>2</inf>O<inf>4</inf> thin film process for Li-ion battery application

بواسطة Bibhuti B. Sahu, Seok H. Kim, Sehwan Kim, Jeon G. Han, Sunkook Kim
منشور في 2020

SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures

بواسطة Jun S. Lee, Su B. Jin, N. Vichiansan, Jeon G. Han, M. Hori, K. Leksakul
منشور في 2018

SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures

بواسطة Jun S. Lee, Su B. Jin, N. Vichiansan, Jeon G. Han, M. Hori, K. Leksakul
منشور في 2018